Height focusing in laser processing/microscopic inspection processes


TS-P series Laser Triangulation Displacement Sensor

In laser cutting equipment and microscopic visual inspection devices, high-magnification objectives are often used to achieve micrometer to sub-micrometer precision in laser processing and visual inspection processes. High-magnification objectives result in a smaller depth of field, making a high-speed automatic focusing module essential for automated equipment with strict timing requirements. This directly impacts the equipment’s efficiency and the achievable precision. TrueSpectra Intelligent’s TS-PD series laser triangulation displacement sensor is the first domestically developed modular laser displacement sensor. It features a hollow central area that can accommodate commonly used variable magnification objectives and microscopic objectives, meeting the high-precision measurement needs of industries such as semiconductors and panels.