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TS-P Series Laser Triangulation Displacement Sensor
Short-range for 3C and semiconductors, mid-range for precision manufacturing, long-range for infrastructure, with an integrated controller, 2mm-2000mm range, 160kHz sampling, and extensive customization.
TS-C series Chromatic Confocal Displacement Sensor
Designed for 3C and semiconductor precision inspection, supporting 1 to 16 synchronized channels, Sensor Head diameter φ3.8 to φ94, sampling up to 30kHz, spot size φ2.7μm to φ400μm, ±5°~60° angles, and compatibility with high-temperature vacuum environments.
TS-I Series Interferometric Thin Film Thickness Sensor
Specialized in coating and thin-film thickness measurement, supporting visible and near-infrared bands, thickness range 1μm~2500μm, 1nm repeatability, and 10kHz measurement speed.
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