Laser Triangulation Displacement Sensor

Product Categories

TS-P Series Laser Triangulation Displacement Sensor

Short-range for 3C and semiconductors, mid-range for precision manufacturing, long-range for infrastructure, with an integrated controller, 2mm-2000mm range, 160kHz sampling, and extensive customization.

TS-C series Chromatic Confocal Displacement Sensor

Designed for 3C and semiconductor precision inspection, supporting 1 to 16 synchronized channels, Sensor Head diameter φ3.8 to φ94, sampling up to 30kHz, spot size φ2.7μm to φ400μm, ±5°~60° angles, and compatibility with high-temperature vacuum environments.

TS-I Series Interferometric Thin Film Thickness Sensor

Specialized in coating and thin-film thickness measurement, supporting visible and near-infrared bands, thickness range 1μm~2500μm, 1nm repeatability, and 10kHz measurement speed.


TS-P25

Reference distance:25mm

Measuring range: ±1mm

Spot diameter: φ18

Static noise: 0.05μm

TS-P70

Reference distance: 70mm

Measuring range: -50~40mm

Spot diameter: φ70μm

Static noise: 1.3μm

TS-P80

Reference distance: 80mm

Measuring range: ±15mm

Spot diameter: φ70μm

Static noise: 0.5μm

TS-P150

Reference distance: 150mm

Measuring range: ±40mm

Spot diameter: φ110μm

Static noise: 1.2μm

TS-P400

Reference distance: 400mm

Measuring range: ±100mm

Spot diameter: φ300μm

Static noise: 3μm

TS-P450

Reference distance: 450mm

Measuring range: ±250mm

Spot diameter: φ320μm

Static noise: 8μm

TS-P1000

Reference distance: 1000mm

Measuring range: ±500mm

Spot diameter: φ320μm

Static noise: 12μm

TS-P1500

Reference distance: 1500mm

Measuring range: ±1000mm

Spot diameter: φ400μm

Static noise: 30μm

TS-P2250

Reference distance: 2250mm

Measuring range: ±650mm

Spot diameter: φ700μm

Static noise: 50μm

TS-PD08

Reference distance: 8mm

Measuring range: ±0.8mm

Spot diameter: φ20μm

Static noise: 0.03μm

TS-PD15

Reference distance: 15mm

Measuring range: ±1mm

Spot diameter: φ35μm

Static noise: 0.05μm

TS-PD50

Reference distance: 50mm

Measuring range: ±0.8mm

Spot diameter: φ25μm

Static noise: 0.05μm