Controller

Product Categories

TS-P Series Laser Triangulation Displacement Sensor

Short-range for 3C and semiconductors, mid-range for precision manufacturing, long-range for infrastructure, with an integrated controller, 2mm-2000mm range, 160kHz sampling, and extensive customization.

TS-C series Chromatic Confocal Displacement Sensor

Designed for 3C and semiconductor precision inspection, supporting 1 to 16 synchronized channels, Sensor Head diameter φ3.8 to φ94, sampling up to 30kHz, spot size φ2.7μm to φ400μm, ±5°~60° angles, and compatibility with high-temperature vacuum environments.

TS-I Series Interferometric Thin Film Thickness Sensor

Specialized in coating and thin-film thickness measurement, supporting visible and near-infrared bands, thickness range 1μm~2500μm, 1nm repeatability, and 10kHz measurement speed.


TS-CCD

Max. Sensor Heads:2

Max. Sampling Rate: 1Head,Max.5 kHz

TS-CCF

Max. Sensor Heads: 3

Max. Sampling Rate:2Heads,Max.5 kHz

TS-CCS

Max. Sensor Heads: 1

Max. Sampling Rate: 4Heads,Max.10 kHz

TS-CCH

Max. Sensor Heads: 16

Max. Sampling Rate: 1Head,Max.20kHz,
2Heads,Max.18kHz,4Heads,Max.12.5kHz,
6Heads,Max.10kHz,8Heads,Max.8kHz,
12Heads,Max.6kHz,16Heads,Max.4kHz,