ITO thin film is a type of n-type semiconductor material with high electrical conductivity, high visible light transmittance, high mechanical hardness, and good chemical stability. It is a commonly used thin film material for transparent electrodes in liquid crystal displays, plasma displays, touch screens, and solar cells. ITO thin film is a very thin metal film that is widely used in transparent conductive thin films and has broad prospects. However, the uniformity of the film thickness directly affects the enterprise’s production cost control, so high-precision measurement of ITO thin film thickness is one of the important inspection items that enterprises must pay attention to. The TS-IT series white light interference thin film thickness measurement sensor from Chushui Intelligent can achieve measurements of thin film thickness in the range of 1~150μm, with a repeatability of 1nm, absolute accuracy of 20nm, and a measurement frequency of 10kHz, meeting the needs of panel manufacturers and thin film manufacturers for online thickness monitoring.