THINFILMO2. The Art and Science of Multilayer Film Thickness Measurement

THINFILMO2. The Art and Science of Multilayer Film Thickness Measurement

Sep 09, 2025

The Art and Science of Multilayer Film Thickness Measurement

Why Multi-Layer Films Are Everywhere and Why They Need Precision

Multilayer films are essential to advanced products, from flexible displays and smart windows to high-performance solar cells and semiconductor wafers. Each layer is engineered for a specific function—anti-reflection, insulation, optical filtering, or protection.

In industries like electronics, optics, semiconductors, and new energy, the thickness of every layer is mission-critical. Even a single nanometer of deviation can compromise performance, reduce efficiency, or shorten product lifespan. That’s why multi-layer film thickness measurement with nanometer-level precision is now a non-negotiable step in quality control and process optimization.

It’s no longer enough to measure just the total stack thickness. Manufacturers must simultaneously and non-destructively measure each individual layer—up to five or more—to ensure flawless product integrity and yield.


Common Applications Requiring Multi-Layer Measurement

  • Flexible Displays & Touchscreens: Multi-layer coatings for anti-reflection, scratch resistance, and touch sensitivity.

  • Solar Cells: Semiconductor and anti-reflective layers that require nanometer-level precision for maximum energy conversion.

  • Semiconductor Manufacturing: Complex stacks of dielectric, conductive, and resistive layers deposited with extreme accuracy.

  • Optical Coatings: Multi-layer films on lenses, mirrors, and filters for precise optical performance.

  • Medical Devices: Functional coatings on implants and stents, where precision directly impacts safety.


Why Traditional Methods Fall Short

Method Pros Cons
Ellipsometry High resolution Complex setup, vibration-sensitive, not inline-capable
Spectroscopic Reflectometry Fast, non-contact Accuracy limited by material stack and refractive index, struggles with opaque films
SEM Direct visual of layers Destructive, expensive, lab-only, very slow
Tronsight Interferometric Sensors Non-contact, high-speed, measures up to 5 layers simultaneously Each series optimized for specific material types

Tronsight’s Unified Approach to Multilayer Precision

At Tronsight, we deliver a portfolio of advanced interferometric thickness sensors designed to solve every multilayer measurement challenge. All series share three pillars: nanometer precision, real-time speed, and non-contact stability—enabling up to five layers measured simultaneously in both R&D and inline production.


TS-IV Series: White Light Interferometric Thickness Sensor

white light interferometric thickness sensor(TS-IV series)

Optimized for transparent and translucent multilayer stacks, the TS-IV analyzes interference peaks from each interface to separate and measure every layer.

Key Features:

  • 1 nm repeatability, ±20 nm linear accuracy for nanometer-level precision.

  • Up to 10 kHz sampling speed for inline inspection of transparent films.

  • 1–2500 µm measurement range, covering ultra-thin coatings to thick laminates.

  • Ideal for display films, optical coatings, glass laminates.


TS-IR Series: Infrared Interferometric Thickness Sensor

Infrared interferometric thickness sensor(TS-IR series)

When visible light can’t penetrate, the TS-IR provides the breakthrough. Using infrared light, it measures internal layers in opaque or dark materials—indispensable in semiconductor manufacturing.

Key Features:

  • 40 kHz sampling speed, 2 nm repeatability—built for high-volume fabs.

  • Infrared penetration enables measurement on silicon, SiC, GaAs, and other IR-transparent materials.

  • Perfect for opaque/dark multilayer stacks where white-light sensors fail.


TS-R Series: Reflective Film Thickness Sensor

Reflective film thickness sensor(TS-R Series)

Engineered for ultra-thin reflective films, the TS-R achieves unmatched accuracy for nanometer-scale monitoring.

Key Features:

  • Minimum 20 nm measurable thickness, ideal for the thinnest coatings.

  • ±1 nm accuracy, 0.05 nm repeatability—the highest stability in its class.

  • Up to 100 Hz sampling speed for real-time process control.

  • Suited for optical films, functional coatings, semiconductor thin films.


Tronsight: Your Partner in Multi-Layer Precision

With the TS-IV, TS-IR, and TS-R series, Tronsight empowers industries to achieve reliable, non-destructive, real-time multilayer film thickness measurement.

Our brand promise—Precision Measurement Expert—means you’re not just buying hardware; you’re partnering with experts who understand your application and deliver tailored solutions.

👉 Discover the right interferometric thickness sensor for your multilayer application today. Contact Tronsight for a consultation.

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